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Double patterning for 32-nm and below: an update
Publication:
Double patterning for 32-nm and below: an update
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Date
2008
Proceedings Paper
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16142.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Finders, Jo
;
Dusa, Mircea
;
Vleeming, Bert
;
Hepp, Birgitt
;
Megens, Henry
;
Maenhoudt, Mireille
;
Cheng, Shaunee
;
Vandeweyer, Tom
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1965
since deposited on 2021-10-17
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Acq. date: 2026-01-09
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Views
1965
since deposited on 2021-10-17
1
last month
1
last week
Acq. date: 2026-01-09
Citations