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Browsing by Author "Mehta, A."

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    The novel use of low temperature hydrogenated microcrystalline silicon germanium (µcSiGe:H) for MEMS applications

    Gromova, Maria
    ;
    Baert, Kris
    ;
    Van Hoof, Chris  
    ;
    Mehta, A.
    ;
    Witvrouw, Ann
    Journal article
    2004, Microelectronic Engineering, (76) 1_4, p.266-271

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