Publication:
The novel use of low temperature hydrogenated microcrystalline silicon germanium (µcSiGe:H) for MEMS applications
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1863 since deposited on 2021-10-15
1last month
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Acq. date: 2026-04-15
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Statistics
Views
1863 since deposited on 2021-10-15
1last month
1last week
Acq. date: 2026-04-15
Citations