Publication:
The novel use of low temperature hydrogenated microcrystalline silicon germanium (µcSiGe:H) for MEMS applications
Date
| dc.contributor.author | Gromova, Maria | |
| dc.contributor.author | Baert, Kris | |
| dc.contributor.author | Van Hoof, Chris | |
| dc.contributor.author | Mehta, A. | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.imecauthor | Van Hoof, Chris | |
| dc.contributor.orcidimec | Van Hoof, Chris::0000-0002-4645-3326 | |
| dc.date.accessioned | 2021-10-15T13:40:17Z | |
| dc.date.available | 2021-10-15T13:40:17Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8986 | |
| dc.source.beginpage | 266 | |
| dc.source.endpage | 271 | |
| dc.source.issue | 1_4 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 76 | |
| dc.title | The novel use of low temperature hydrogenated microcrystalline silicon germanium (µcSiGe:H) for MEMS applications | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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