Browsing by Author "Melvin, Lawrence, III"
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Publication Contribution of mask roughness in stochasticity of high-NA EUV imaging
; Melvin, Lawrence, IIIProceedings paper2021-11, International Conference on Extreme Ultraviolet Lithography, SEP 27-OCT 01, 2021Publication Does high-NA EUV require tighter mask roughness specifications: a simulation study
; Melvin, Lawrence, IIIProceedings paper2022, International Conference on Extreme Ultraviolet Lithography, SEP 26-29, 2022