Publication:
Contribution of mask roughness in stochasticity of high-NA EUV imaging
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Acq. date: 2026-08-06
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859 since deposited on 2022-05-22
18last month
6last week
Acq. date: 2026-08-06
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1675 since deposited on 2022-05-22
Acq. date: 2026-08-06
Citations