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Browsing by Author "Melvin, Lawrence S., III"

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    Contribution of mask defectivity in stochastics of EUVL-based wafer printing

    Melvin, Lawrence S., III
    ;
    Jonckheere, Rik  
    Journal article
    2021, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (20) 2, p.021003

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