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Browsing by Author "Melvin III, Lawrence"

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    Stochastic printing behavior of non-local mask deficiencies in EUV lithography

    Jonckheere, Rik  
    ;
    Melvin III, Lawrence
    Proceedings paper
    2020, Extreme Ultraviolet Lithography 2020, 21/09/2020, p.1151710
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    Two-dimensional feature stochastic printing with mask deficiencies in high-NA EUV

    Melvin III, Lawrence
    ;
    Jonckheere, Rik  
    ;
    Hendrickx, Eric  
    Oral presentation
    2021, Extreme Ultraviolet (EUV) Lithography XII

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