Browsing by Author "Melvin III, Lawrence"
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Publication Stochastic printing behavior of non-local mask deficiencies in EUV lithography
; Melvin III, LawrenceProceedings paper2020, Extreme Ultraviolet Lithography 2020, 21/09/2020, p.1151710Publication Two-dimensional feature stochastic printing with mask deficiencies in high-NA EUV
Oral presentation2021, Extreme Ultraviolet (EUV) Lithography XII