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Browsing by Author "Mencarelli, M."

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    Cutting-edge epitaxial processes for sub 3 nm technology nodes: application to nanosheet stacks and epitaxial wrap-around contacts

    Hikavyy, Andriy  
    ;
    Porret, Clément  
    ;
    Mencarelli, M.
    ;
    Loo, Roger  
    ;
    Favia, Paola  
    ;
    Ayyad, Mustafa  
    Proceedings paper
    2021, 240th ECS Meeting Symposiusm: Semiconductor Process Integration 12, 10/10/2021, p.139-146

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