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Browsing by Author "Merkel, Ulrich"

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    Enhanced growth and Cu diffusion barrier properties of thermal ALD TaNC films

    Wojcik, Henry
    ;
    Hossbach, Christoph
    ;
    Kubasch, Christoph
    ;
    Verdonck, Patrick  
    ;
    Barbarin, Yohan
    Journal article
    2013, Microelectronic Engineering, 110, p.29-34

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