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Browsing by Author "Mertens, Luc"

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    Apparent and steady-state etch rates in thin film etching and underetching of microstructures. I: Modeling

    Van Barel, Gregory
    ;
    Mertens, Luc
    ;
    De Ceuninck, Ward  
    ;
    Witvrouw, Ann
    Journal article
    2010, Journal of Micromechanics and Microengineering, (20) 5, p.55033

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