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Apparent and steady-state etch rates in thin film etching and underetching of microstructures. I: Modeling
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1898 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-08
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Metrics
Views
1898 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-08
Citations