Browsing by Author "Meshman, Boris"

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Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves

Urbanowicz, Adam
;
Meshman, Boris
;
Schneider, Dieter
;
Baklanov, Mikhaïl
Proceedings paper
2007, 4th International Conference on Spectroscopic Ellipsometry, 11/06/2007
Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves

Urbanowicz, Adam
;
Meshman, Boris
;
Schneider, Dieter
;
Baklanov, Mikhaïl
Journal article
2008, physica status solidi A, (205) 4, p.829-832