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Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves
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1869 since deposited on 2021-10-16
Acq. date: 2025-12-11
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Views
1869 since deposited on 2021-10-16
Acq. date: 2025-12-11
Citations