Publication:
Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves
Date
| dc.contributor.author | Urbanowicz, Adam | |
| dc.contributor.author | Meshman, Boris | |
| dc.contributor.author | Schneider, Dieter | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-16T20:22:12Z | |
| dc.date.available | 2021-10-16T20:22:12Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13006 | |
| dc.source.conference | 4th International Conference on Spectroscopic Ellipsometry | |
| dc.source.conferencedate | 11/06/2007 | |
| dc.source.conferencelocation | Stockholm Sweden | |
| dc.title | Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |