Browsing by Author "Mesuda, Kei"
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Publication Impact of alternative mask stacks on the imaging performance at NA 1.20 and above
Proceedings paper2007, SPIE Photomask Technology (BACUS), 18/09/2007, p.67301NPublication Mask transmission resonance in bi-layer masks
Proceedings paper2008, Photomask and Next-Generation Lithography Mask Technology XV, 16/04/2008, p.702815Publication Observation of negative mask error enhancement factor due to mask transmission resonance
Journal article2008, Journal of Micro/Nanolithography, MEMS, and MOEMS, (7) 2, p.20501