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Observation of negative mask error enhancement factor due to mask transmission resonance
Publication:
Observation of negative mask error enhancement factor due to mask transmission resonance
Date
2008
Journal article
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16413.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Philipsen, Vicky
;
De Bisschop, Peter
;
Mesuda, Kei
Journal
Journal of Micro/Nanolithography, MEMS, and MOEMS
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1948
since deposited on 2021-10-17
Acq. date: 2025-10-30
Citations
Metrics
Views
1948
since deposited on 2021-10-17
Acq. date: 2025-10-30
Citations