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Browsing by Author "Metz, Andrew"

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    Plasma etch selectivity study and material screening for Self-Aligned Gate Contact (SAGC)

    Radisic, Dunja  
    ;
    Demand, Marc  
    ;
    Chan, Shihsheng
    ;
    Demuynck, Steven  
    ;
    Kumar, Kaushik  
    ;
    Metz, Andrew
    Proceedings paper
    2019, Advanced Etch Technology for Nanopatterning VIII, 24/02/2019, p.109630P

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