Browsing by Author "Metz, Andrew W"
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Publication Co-optimization of lithographic and patterning processes for improved EPE performance
;Maslow, Mark ;Timoshkov, Vadim ;Kiers, Ton ;Jee, Tae Kwon ;de Loijer, PeterMorikita, ShinyaProceedings paper2017, Advanced Etch Technology for Nanopatterning VI, 27/02/2017, p.101490N