Browsing by Author "Meura, Kim-Anh Bui-Thi"
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Publication Characterization of arsenic PIII Implants in FinFETs by LEXES, SIMS and STEM-EDX
;Meura, Kim-Anh Bui-Thi ;Torregrosa, Frank ;Robbes, Anne-SophieChoi, SeoyounProceedings paper2014, 20th International Conference on Ion Implantation Technology - IITC, 26/06/2014, p.1-4