Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Miloslavsky, Alexander"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Double-patterning interactions with wafer processing, optical proximity correction, and physical design flows

    Lucas, Kevin
    ;
    Cork, Christopher M.
    ;
    Miloslavsky, Alexander
    ;
    Luk-Pat, Gerard
    ;
    Barnes, Levi D.
    Journal article
    2009, Journal of Micro/Nanolithography, MEMS, and MOEMS, (8) 3, p.33002

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings