Browsing by Author "Miloslavsky, Alexander"
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Publication Double-patterning interactions with wafer processing, optical proximity correction, and physical design flows
;Lucas, Kevin ;Cork, Christopher M. ;Miloslavsky, Alexander ;Luk-Pat, GerardBarnes, Levi D.Journal article2009, Journal of Micro/Nanolithography, MEMS, and MOEMS, (8) 3, p.33002