Browsing by Author "Minjauw, Matthias M."
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Publication Atomic layer deposition of aluminum phosphate layers using tris(dimethylamino)phosphine as P-precursor
Journal article2025, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, (43) 2, p.022409Publication Atomic Layer Deposition of Boron-Containing Layers Using a Combined Trimethylborate- and Water-Based Plasma
Publication Atomic Layer Deposition of Ruthenium Dioxide Based on Redox Reactions between Alcohols and Ruthenium Tetroxide
Publication Converting molecular layer deposited alucone films into Al2O3/alucone hybrid multilayers by plasma densification
Journal article2021, DALTON TRANSACTIONS, (50) 4Publication In vacuo XPS study: controlled ALD growth of Al2O3 on metallic lithium enabled by plasma pretreatment
Journal article2026, JOURNAL OF MATERIALS CHEMISTRY A, (14) 33, p.21682-21694Publication Plasma-enhanced atomic layer deposition of nanostructured gold near room temperature
Journal article2019, ACS Applied Materials & Interfaces, (11) 40, p.37229-37238