Publication:

Atomic Layer Deposition of Ruthenium Dioxide Based on Redox Reactions between Alcohols and Ruthenium Tetroxide

Date

2022-09-21
Journal article
https://doi.org/10.1021/acs.chemmater.2c02292
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

RuO2 ALD main.pdf 6.57 MB
Accepted version 2.02 MB

Author(s)

Poonkottil, Nithin
;
Minjauw, Matthias M.
;
Werbrouck, Andreas
;
Checchia, Stefano
;
Solano, Eduardo
;
Nisula, Mikko
;
Franquet, Alexis  
;
Detavernier, Christophe
;
Dendooven, Jolien

Journal

CHEMISTRY OF MATERIALS

Abstract

Description

Metrics

Downloads

1012 since deposited on 2022-10-12
89last month
18last week
Acq. date: 2026-01-06

Views

1660 since deposited on 2022-10-12
1last month
Acq. date: 2026-01-06

Citations

Metrics

Downloads

1012 since deposited on 2022-10-12
89last month
18last week
Acq. date: 2026-01-06

Views

1660 since deposited on 2022-10-12
1last month
Acq. date: 2026-01-06

Citations