Browsing by Author "Misaka, Akio"
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication Mask enhancer technology for 45-nm node contact hole fabrication
Proceedings paper2005, Optical Microlithography XVIII, 27/02/2005, p.1377-1387Publication Mask enhancer technology on ArF immersion tool for 45nm-node CMOS with 0.249μm² SRAM contact layer fabrication
Proceedings paper2005, Proceedings International Microprocess and Nanotechnology Conference, 26/10/2005, p.14-15