Publication:
Mask enhancer technology on ArF immersion tool for 45nm-node CMOS with 0.249μm² SRAM contact layer fabrication
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1882 since deposited on 2021-10-16
Acq. date: 2025-10-23
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Metrics
Views
1882 since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations