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Browsing by Author "Misat, Sylvain Irenee"

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    Surfactinated rinse against pattern collapse and defectivity in 193 nm lithography

    Misat, Sylvain Irenee
    ;
    Grozev, Grozdan  
    ;
    Versluijs, Janko  
    Oral presentation
    2004, 7th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS

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