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Browsing by Author "Mitsuhashi, Riichiru"

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    Novel process to pattern selectively dual dielectric capping layers using soft-mask only

    Schram, Tom  
    ;
    Kubicek, Stefan  
    ;
    Rohr, Erika
    ;
    Brus, Stephan  
    ;
    Vrancken, Christa  
    ;
    Chang, Shou-Zen
    Proceedings paper
    2008, Symposium on VLSI Technology Digest of Technical Papers, 17/06/2008, p.44-45

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