Browsing by Author "Miyashita, Hiroyuki"

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LENS (Lithography Enhancement towards Nano Scale) a european project to support double exposure and double patterning technology development

Cantu, Pietro
;
Baldi, Livio
;
Piacentini, Paolo
;
Sytsma, Joost
;
Le Gratiet, Bernard
Proceedings paper
2010, Optical Microlithography XXIII, 21/02/2010, p.764022
LENS - Lithography enhancement towards nano scale

Cantu, Pietro
;
Baldi, Livio
;
De Simone, Danilo
;
Piacentini, Paolo
;
Fliervoet, Timon
Oral presentation
2010, European Nanoelectronics Forum