Browsing by Author "Mizuta, Hiroshi"
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Publication Design and analysis of an in-plane resonant nano-electro-mechanical sensor for sub-attogram-level molecular mass-detection
Proceedings paper2009, Solid State Devices and Materials Conference - SSDM, 7/10/2009, p.J-6-5Publication Mass-detection based in-plane resonant nano-electro-mechanical sensors
Oral presentation2013, Japan Society of Applied Physics (JSAP) Annual MeetingPublication Nanoscale selective silicon nanowires surface functionalization for sensing applications
Meeting abstract2010, MRS Spring Meeting Symposium K: Functional Materials and Nanostructures for Chemical and Biochemical Sensing, 5/11/2010, p.K6.4Publication Numerical analysis of zeptogram/Hz-level mass responsivity for in-plane resonant nano-electro-mechanical sensors
Journal article2011, Microelectronic Engineering, (88) 9, p.2879-2894Publication Selective surface functionalization of Si and poly-SiGe resonators for a monolithic integration of bio- and gas sensors with CMOS
Meeting abstract2012, MRS Spring Meeting Symposium B: Heterogeneous Integration Challenges of MEMS, Sensor, and CMOS LSI, 9/04/2012Publication Silicon nanowires for advanced sensing: Electrical and electromechanical characteristics and functionalisation technology
Proceedings paper2011, International Symposium on Advanced Hybrid Nano Devices - IS AHND, 4/10/2011Publication Suspended silicon nanowire devices for chemical and biological sensing
Oral presentation2012, GdR Nanofils Nanotubes SemiconducteursPublication Temperature insensitive conductance detection with surface-functionalised silicon nanowire sensors
Journal article2011, Microelectronic Engineering, (88) 8, p.1753-1756Publication Temperature insensitive conductance detection with surface-functionalized silicon nanowire sensors
Meeting abstract2010, 36th International Conference on Micro & Nano Engineering - MNE, 19/09/2010Publication Towards nano-scale resonant gas sensors