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Selective surface functionalization of Si and poly-SiGe resonators for a monolithic integration of bio- and gas sensors with CMOS
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1894 since deposited on 2021-10-20
1last month
Acq. date: 2025-12-08
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Views
1894 since deposited on 2021-10-20
1last month
Acq. date: 2025-12-08
Citations