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Selective surface functionalization of Si and poly-SiGe resonators for a monolithic integration of bio- and gas sensors with CMOS

Date

2012
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dc.contributor.authorArmini, Silvia
dc.contributor.authorCherman, Vladimir
dc.contributor.authorVolodin, Alexander
dc.contributor.authorLenci, Silvia
dc.contributor.authorPieri, Francesco
dc.contributor.authorWouters, Daan
dc.contributor.authorMoonens, Jos
dc.contributor.authorNeutens, Pieter
dc.contributor.authorDupre, Cecilia
dc.contributor.authorOllier, Eric
dc.contributor.authorTsuchiya, Yoshi
dc.contributor.authorMizuta, Hiroshi
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorLenci, Silvia
dc.contributor.imecauthorNeutens, Pieter
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.accessioned2021-10-20T10:02:30Z
dc.date.available2021-10-20T10:02:30Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20306
dc.source.conferenceMRS Spring Meeting Symposium B: Heterogeneous Integration Challenges of MEMS, Sensor, and CMOS LSI
dc.source.conferencedate9/04/2012
dc.source.conferencelocationSan Francisco, CA USA
dc.title

Selective surface functionalization of Si and poly-SiGe resonators for a monolithic integration of bio- and gas sensors with CMOS

dc.typeMeeting abstract
dspace.entity.typePublication
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