Browsing by Author "Mizutani, Atsushi"
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Publication Cobalt pre-metallization clean and functional water rinse in BEOL interconnect
Meeting abstract2019, Surface Preparation and Cleaning Conference (SPCC 2019), 2/04/2019Publication Effect of cleaning chemistries on cobalt: surface chemistries
Proceedings paper2018, Ultra Clean Processing of Semiconductor Surfaces XIV - UCPSS, 2/09/2018, p.263-267Publication Integrated clean for TSV: comparison between dry process and wet processes and their electrical qualification
Proceedings paper2016, IEEE 18th Electronics Packaging Technology Conference - EPTC, 30/11/2016, p.441-444