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Effect of cleaning chemistries on cobalt: surface chemistries
Publication:
Effect of cleaning chemistries on cobalt: surface chemistries
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Date
2018
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Le, Quoc Toan
;
Kesters, Els
;
Akanishi, Yuya
;
van der Veen, Marleen
;
Mizutani, Atsushi
;
Holsteyns, Frank
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1917
since deposited on 2021-10-25
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Acq. date: 2025-12-16
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Views
1917
since deposited on 2021-10-25
1
last month
Acq. date: 2025-12-16
Citations