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Browsing by Author "Mocella, Michael"

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    High-index immersion fluids enabling cost-effective single-exposure lithography for 32nm half pitches

    French, Roger H.
    ;
    Tran, Hoang V.
    ;
    Adelman, Doug J.
    ;
    Rogado, Nyrissa S.
    ;
    Kaku, Mureo
    Proceedings paper
    2008, Optical Microlithography XXI, 24/02/2008, p.692417

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