Browsing by Author "Mocella, Michael"
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Publication High-index immersion fluids enabling cost-effective single-exposure lithography for 32nm half pitches
;French, Roger H. ;Tran, Hoang V. ;Adelman, Doug J. ;Rogado, Nyrissa S.Kaku, MureoProceedings paper2008, Optical Microlithography XXI, 24/02/2008, p.692417