Browsing by Author "Mody, J."
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Publication Atom probe tomography for 3D-dopant analysis in FinFET devices
Proceedings paper2012, Symposium on VLSI Technology - VLSIT, 12/06/2012, p.77-78Publication High performance n-mos FinFET by damage-free, conformal extension doping
Proceedings paper2011, IEEE International Electron Devices Meeting - IEDM, 5/12/2011, p.841-844