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Browsing by Author "Mogil'nikov, K."

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    Adsorption isobars of fluorocarbon compounds for cryogenic plasma etching of low-k dielectrics (in Russian)

    Rezvanov, A.
    ;
    Gutshin, O.
    ;
    Gornev, E.
    ;
    Krasnikov, G.
    ;
    Mogil'nikov, K.
    ;
    Zhang, Liping  
    Journal article
    2015, Electronic Engineering, 3, p.49

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