Browsing by Author "Mohsen, Mahmoud"
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Publication 28nm-pitch Ru interconnects patterned with 0.33NA-EUV single exposure
Proceedings paper2021, International Conference on Extreme Ultraviolet Lithography, SEP 27-OCT 01, 2021, p.32-41Publication Improving Silicon-photonics inverse-design printability by leveraging SEM contours for advanced Optical Proximity Correction techniques
Proceedings paper2022, Conference on Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV Part of SPIE Photonics West OPTO Conference, JAN 22-FEB 24, 2022, p.1201208