Publication:

28nm-pitch Ru interconnects patterned with 0.33NA-EUV single exposure

Date

2021

Proceedings Paper

https://doi.org/10.1117/12.2600937

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Author(s)

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Mahmud Ul Hasan, Hasan MD

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Leray, Philippe

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Mohsen, Mahmoud

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De Poortere, Etienne

Journal

Proceedings of SPIE

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Acq. date: 2026-08-07