Browsing by Author "Monchoix, Hervé"
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Publication Development of an SBT MOCVD production process for FERAM applications
Meeting abstract2001, 13th International Symposium on Integrated Ferroelectrics - ISIF, 11/03/2001, p.8.2.1CPublication Integration of ferroelectric SrBi2Ta2O9-based capacitors beyond 0.18 CMOS technology
Oral presentation2003, Conference of Surface Science and their Applications - CLACSA-11Publication Spacers alternatives for integration of 3D stacked SBT FeCAPs
Journal article2003, Integrated Ferroelectrics, 53, p.257-267Publication SrBi2Ta2O2 Patterning for feram applications: a dry -wet approach
Oral presentation2003, European Congress on Advanced Materials and Processes - Euromat