Browsing by Author "Morel, A."
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Publication Physical properties of polycrystalline aluminium nitride films deposited by magnetron sputtering
Journal article2004, Diamond and Related Materials, (13) 4_8, p.1120-1124Publication Titaniuim nitride growth by sputtering for contacts on boron doped diamond
Journal article2007, Processes and Polymers, (4) S1, p.S139-S143