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Browsing by Author "Morikawa, Yasutaka"

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    Blank defect coverage budget for 16nm half-pitch single EUV exposure

    Jonckheere, Rik  
    ;
    Yamane, Takeshi
    ;
    Morikawa, Yasutaka
    ;
    Kamo, Takashi
    Proceedings paper
    2018, Photomask Japan 2018: XXV Symposium on Photomask and Next-Generation Lithography Mask Technology, 18/04/2018, p.108070H

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