Publication:

Blank defect coverage budget for 16nm half-pitch single EUV exposure

Date

2018

Proceedings Paper

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Files

37728.pdf 942.47 KB

Author(s)

Jonckheere, Rik

;

Yamane, Takeshi

;

Morikawa, Yasutaka

;

Statistics

1906 since deposited on 2021-10-25

Acq. date: 2026-02-25