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Browsing by Author "Mortini, B."

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    Lithographic performance of 193 nm resist

    Goethals, Mieke
    ;
    Pollers, Ingrid
    ;
    Van Roey, Frieda  
    ;
    Sugihara, Takashi
    ;
    Ronse, Kurt  
    ;
    Heskamp, B.
    Proceedings paper
    1998, 193nm '98. At the Peak. 4th International Symposium on 193 nm Lithography. Abstracts Book, 14/09/1998, p.P-020

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