Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Mouhib, Tarik"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Ar-cluster beam profiling of material modifications in ion implanted deep ultraviolet photoresist

    Conard, Thierry  
    ;
    Franquet, Alexis  
    ;
    Tsvetanova, Diana  
    ;
    Mouhib, Tarik
    ;
    Vandervorst, Wilfried  
    Meeting abstract
    2011, 18th International Conference on Secondary Ion Mass Spectrometry - SIMS, 18/09/2011

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings