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Browsing by Author "Moussa, Alan"

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    Need for LWR metrology standardization: the imec roughness protocol

    Lorusso, Gian  
    ;
    Sutani, Takeyoshi
    ;
    Rutigliani, Vito  
    ;
    Van Roey, Frieda  
    ;
    Moussa, Alan
    Journal article
    2018, Journal of Micro/Nanolithography MEMS and MOEMS, 17, p.41009

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