Publication:

Need for LWR metrology standardization: the imec roughness protocol

Date

2018
Journal article
https://doi.org/10.1117/1.JMM.17.4.041009
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Author(s)

Lorusso, Gian  
;
Sutani, Takeyoshi
;
Rutigliani, Vito  
;
Van Roey, Frieda  
;
Moussa, Alan
;
Charley, Anne-Laure  
;
Mack, Chris
;
Naulleau, Patrick
;
Perera, Chami
;
Constantoudis, Vassilios
;
Ikota, Masami
;
Ishimoto, Toru
;
Koshihara, Shunshuke

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Abstract

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1991 since deposited on 2021-10-25
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Acq. date: 2025-12-10

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