Need for LWR metrology standardization: the imec roughness protocol

Lorusso, Gian; Sutani, Takeyoshi; Rutigliani, Vito; Van Roey, Frieda; Moussa, Alan; Charley, Anne-Laure; Mack, Chris; Naulleau, Patrick; Perera, Chami; Constantoudis, Vassilios; Ikota, Masami; Ishimoto, Toru; Koshihara, Shunshuke

doi:10.1117/1.JMM.17.4.041009

Publication:

Need for LWR metrology standardization: the imec roughness protocol

Date

2018

Journal article

https://doi.org/10.1117/1.JMM.17.4.041009

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Constantoudis, Vassilios

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Ikota, Masami

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Ishimoto, Toru

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Koshihara, Shunshuke

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

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1992 since deposited on 2021-10-25

Acq. date: 2026-02-27

Need for LWR metrology standardization: the imec roughness protocol

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