Publication:
Need for LWR metrology standardization: the imec roughness protocol
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
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| cris.virtual.orcid | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0003-4745-0167 | |
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| cris.virtualsource.department | afe860fb-17ef-4e14-b8be-130d9091bd88 | |
| cris.virtualsource.department | 264c186e-7bc4-4bed-8d4f-11fe1bff9e26 | |
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| cris.virtualsource.orcid | afe860fb-17ef-4e14-b8be-130d9091bd88 | |
| cris.virtualsource.orcid | 264c186e-7bc4-4bed-8d4f-11fe1bff9e26 | |
| dc.contributor.author | Lorusso, Gian | |
| dc.contributor.author | Sutani, Takeyoshi | |
| dc.contributor.author | Rutigliani, Vito | |
| dc.contributor.author | Van Roey, Frieda | |
| dc.contributor.author | Moussa, Alan | |
| dc.contributor.author | Charley, Anne-Laure | |
| dc.contributor.author | Mack, Chris | |
| dc.contributor.author | Naulleau, Patrick | |
| dc.contributor.author | Perera, Chami | |
| dc.contributor.author | Constantoudis, Vassilios | |
| dc.contributor.author | Ikota, Masami | |
| dc.contributor.author | Ishimoto, Toru | |
| dc.contributor.author | Koshihara, Shunshuke | |
| dc.contributor.imecauthor | Lorusso, Gian | |
| dc.contributor.imecauthor | Van Roey, Frieda | |
| dc.contributor.imecauthor | Charley, Anne-Laure | |
| dc.date.accessioned | 2021-10-25T22:34:38Z | |
| dc.date.available | 2021-10-25T22:34:38Z | |
| dc.date.issued | 2018 | |
| dc.identifier.doi | 10.1117/1.JMM.17.4.041009 | |
| dc.identifier.issn | 1932-5150 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31242 | |
| dc.identifier.url | https://doi.org/10.1117/1.JMM.17.4.041009 | |
| dc.source.beginpage | 41009 | |
| dc.source.journal | Journal of Micro/Nanolithography MEMS and MOEMS | |
| dc.source.volume | 17 | |
| dc.title | Need for LWR metrology standardization: the imec roughness protocol | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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