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Browsing by Author "Moyer, Eric"

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    A new ultra-low K ILD material based on organic-inorganic hybrid resins

    Zhong, Ben
    ;
    Meynen, Herman
    ;
    Iacopi, Francesca
    ;
    Weidner, Ken
    ;
    Malhouitre, Stéphane
    ;
    Moyer, Eric
    Proceedings paper
    2002, Silicon Materials - Processing, Characterization, and Reliability, 1/04/2002, p.B12.4

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