Browsing by Author "Mueller, Markus"
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Publication Low VT metal-gate/high-k nMOSFETs - PBTI dependence and VT tune-ability on La/Dy-capping layer locations and laser annealing conditions
Publication N-type VT tuning by Te ion implantation in moly-based metal gates with high-k dielectric for fully depleted devices
Proceedings paper2008, 38th European Solid-State Device Research Conference - ESSDERC, 16/09/2008, p.286-289