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Low VT metal-gate/high-k nMOSFETs - PBTI dependence and VT tune-ability on La/Dy-capping layer locations and laser annealing conditions
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1940 since deposited on 2021-10-17
Acq. date: 2026-01-09
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1940 since deposited on 2021-10-17
Acq. date: 2026-01-09
Citations