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Low VT metal-gate/high-k nMOSFETs - PBTI dependence and VT tune-ability on La/Dy-capping layer locations and laser annealing conditions

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1948 since deposited on 2021-10-17
2last month
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Acq. date: 2026-08-16

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1948 since deposited on 2021-10-17
2last month
1last week
Acq. date: 2026-08-16

Citations